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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
LAM RESEARCH CORPORATION	4650 CUSHING PARKWAY FREMONT CA 94538

International Classification(s)

• C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....
• H01J:ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
• C25D:PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC ....
• B23K:SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLA....
• B32B:LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA....

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
DAUGHERTY, John	Fremont, US	72	948
SHIH, Hong	Walnut, US	104	3488
SONG, Yiwei	Union City, US	11	86
SRINIVASAN, Satish	Newark, US	20	305
XU, Lin	Katy, US	198	5073

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
7.5 Year Payment	$3600.00	$1800.00	$900.00	Jun 29, 2024
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Jun 29, 2028

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 7.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 2016/0375,515

USE OF ATOMIC LAYER DEPOSITION COATINGS TO PROTECT BRAZING LINE AGAINST CORROSION, EROSION, AND ARCING

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