Importance

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Abstract

A method of fabricating a semiconductor structure includes: grinding a backside surface of a semiconductor substrate such that the backside surface has a relatively high average roughness (Ra) (when compared with a backside surface subjected to chemical mechanical polishing (CMP)), and then, forming a backside metal structure on the backside surface while the backside surface has the relatively high average roughness. The backside surface can have an average roughness in the range of about 5 to 100 nanometers (or alternately, in the range of about 20 to 40 nanometers) when the backside metal structure is formed. The backside metal structure may be electrically coupled to through silicon vias (TSVs), which supply ground to semiconductor devices fabricated on a front side of the semiconductor substrate.

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First Claim