Piezoelectric device, liquid ejection head, and method of manufacturing piezoelectric device

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United States of America Patent

PATENT NO 9809026
SERIAL NO

15178809

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Abstract

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A piezoelectric device includes a first substrate having an empty chamber, a diaphragm defining a surface of the empty chamber, a piezoelectric element formed by stacking a first electrode layer, a piezoelectric layer, and a second electrode layer in sequence from the diaphragm side, the piezoelectric element provided on the side of the diaphragm opposite to the empty chamber, and a second substrate provided on the side of the first substrate opposite to the diaphragm. The thickness of at least a part of the first substrate in an opening peripheral area of the empty chamber is thicker than the thickness in an area outside the opening peripheral area.

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Patent Owner(s)

  • SEIKO EPSON CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Takabe, Motoki Shiojiri, JP 148 335

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