CRYOPUMP HYBRID FRONTAL ARRAY
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United States of America Patent
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Issued Date -
Jan 12, 2017
app pub date -
Sep 20, 2016
filing date -
Mar 21, 2014
priority date (Note) -
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Abstract
A cryopump comprises a refrigerator, a condensing array cooled by the refrigerator, a radiation shield surrounding the condensing array and cooled by the refrigerator. The radiation shield has a frontal opening covered by a frontal array that is also cooled by the refrigerator. The frontal array comprises louvers across an otherwise substantially open center region of the frontal opening and an orifice plate across an outer region of the frontal opening. The hybrid frontal array allows for pumping speeds approximating those of a louver frontal array but with flow control comparable to an orifice plate.
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