Physical quantity sensor, physical quantity sensor device, electronic apparatus, and moving object
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United States of America Patent
Stats
-
Nov 20, 2018
Grant Date -
Jan 12, 2017
app pub date -
Jun 28, 2016
filing date -
Jul 10, 2015
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A physical quantity sensor includes a base substrate and an element piece bonded to the base substrate. The element piece includes fixed portions fixed to the base substrate, a first fixed electrode finger supported on the fixed portion, a second fixed electrode finger supported on the fixed portion, a fixed portion that is positioned between the fixed portions and is fixed to the base substrate, a movable portion that is displaceable with respect to the fixed portion, an elastic portion that links the fixed portion and the movable portion, a first movable electrode finger that is supported on the movable portion and that is arranged facing the first fixed electrode finger, and a second movable electrode finger that is supported on the movable portion and is arranged facing the second fixed electrode finger.
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