Physical quantity sensor having a frame-shaped movable mass, electronic device, and mobile body
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United States of America Patent
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Dec 11, 2018
Grant Date -
Jan 12, 2017
app pub date -
Jun 28, 2016
filing date -
Jul 10, 2015
priority date (Note) -
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status (Latency Note)
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Abstract
A physical quantity sensor includes a movable electrode side fixed section, a first fixed electrode side fixed section which has a first fixed electrode section and a second fixed electrode side fixed section which has a second fixed electrode section, a movable mass section which has a first movable electrode section that has a portion facing the first fixed electrode section and a second movable electrode section that has a portion facing the second fixed electrode section and which is formed in a shape that encloses the movable electrode side fixed section, the first fixed electrode side fixed section, and the second fixed electrode side fixed section in planar view, and an elastic section which connects the movable electrode side fixed section and the movable mass section.
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