VIBRATOR AND MANUFACTURING METHOD THEREFOR, OSCILLATOR, ELECTRONIC DEVICE, AND MOVABLE BODY
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United States of America Patent
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app pub date -
Jul 1, 2016
filing date -
Jul 8, 2015
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Abstract
A vibrator includes a substrate, an electrode located on the substrate, a vibrating piece, an interconnect that includes a first joining portion surrounding the electrode on the substrate and is connected to the vibrating piece and electrically connected to the electrode, and a lid portion that has an opening for exposing the electrode and is joined to the first joining portion.
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