METHOD OF PRODUCING VACUUM SEALED COMPONENT
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United States of America Patent
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Issued Date -
Jan 19, 2017
app pub date -
Jun 23, 2016
filing date -
Jul 13, 2015
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Abstract
There is provided a method of producing a vacuum sealed component including a sealing layer formed by heating glass powder, an inner side of the sealing layer including a closed space with specific air pressure that is lower than atmospheric pressure. The method includes a binder removal process of decomposing an organic binder by heating paste including the glass power and an organic binder; and a vacuum sintering process of forming the closed space by melting, at a temperature that is higher than a processing temperature of the binder removal process, the glass powder in a decompressed space with the specific air pressure that is lower than the atmospheric pressure. After the binder removal process and prior to the vacuum sintering process, an amount of residual carbon in a residue of the paste is less than or equal to 100 ppm by weight.
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