Method and system for optimizing configurable parameters of inspection tools

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United States of America Patent

PATENT NO 9711327
APP PUB NO 20170018403A1
SERIAL NO

14801600

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Abstract

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A method, computer product and system for optimization of configurable parameters of inspection tools are provided. The method includes applying a heuristic that utilizes a prioritized sequence of selections of configurable parameters. For each configuration setting of the heuristic the method includes providing a set of local scan images of a list of DOIs, calculating an optimization target function and updating the configuration settings with the best value of each scanned parameter according to said prioritization heuristic. The method includes outputting the one or more updated configuration settings to a recipe file.

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Patent Owner(s)

  • APPLIED MATERIALS ISRAEL, LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Koronel, Dan Tel Aviv, IL 2 8
Wilde, Amir Rehovot, IL 1 1

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