Ultrasonic device, piezoelectric device, ultrasonic measurement apparatus, and electronic instrument

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United States of America Patent

PATENT NO 10350639
APP PUB NO 20170028440A1
SERIAL NO

15210096

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Abstract

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An ultrasonic device includes an element substrate provided with an ultrasonic transducer array in which a plurality of ultrasonic transducers are arranged in an array, a sealing plate (array counter plate) that is bonded to the element substrate and covers at least the ultrasonic transducer array, and a support substrate that supports at least one of the element substrate and the sealing plate, and the support substrate has a through hole (insertion section) into which at least part of the sealing plate is inserted.

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Patent Owner(s)

  • SEIKO EPSON CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kiyose, Kanechika Matsumoto, JP 101 426

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