Optical scanner, optical scanning method and non-transient recording medium

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United States of America Patent

PATENT NO 10067339
APP PUB NO 20170031154A1
SERIAL NO

14810675

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Abstract

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An optical scanner comprises a light source, an MEMS mirror and a position detector. The light source emits a light beam. The MEMS mirror deflects the light beam emitted from the light source. The position detector detects the position of the MEMS mirror. The position detector is configured on the same semiconductor substrate with the MEMS mirror.

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Patent Owner(s)

  • KABUSHIKI KAISHA TOSHIBA; KABUSHIKI KAISHA TOSHIBA AND TOSHIBA TEC KABUSHIKI KAISHA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ueno, Sueo Shizuoka, JP 42 115

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