Electronic apparatus, manufacturing method thereof, oscillator, electronic appliance, and mobile unit
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United States of America Patent
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Jun 12, 2018
Issued Date -
Feb 2, 2017
app pub date -
Jul 11, 2016
filing date -
Jul 29, 2015
priority date (Note) -
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status (Latency Note)
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Abstract
An electronic apparatus according to the invention includes a substrate, a side wall that is disposed directly on the substrate or via an insulation film and forms a hollow, a functional element that is disposed within the hollow, a first layer that is disposed on the side wall so as to cover the hollow and has a first through hole that communicates with the hollow, a second layer that is disposed on the first layer so as to cover the hollow and has a second through hole that has a diameter smaller than a diameter of the first through hole and at least partially overlaps the first through hole as viewed in plan view, and a third layer that is disposed on the second layer so as to seal at least the second through hole.
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