METHOD FOR COATING OR FILLING A POROUS MATERIAL

United States of America Patent

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Feb 9, 2017
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Jul 12, 2016
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Jul 13, 2015

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Abstract

A method is provided for coating or filling a porous material. According to one embodiment, the method includes providing the porous material, delivering precursor molecules by gas phase exposure into pores of the porous material, and reacting the precursor molecules to form a polymer inside the pores.

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Patent Owner	Address
TOKYO ELECTRON LIMITED	TOKYO

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C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....

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Inventor Name	Address	# of filed Patents	Total Citations
Faguet, Jacques	Austin, US	51	3340
Liu, Junjun	Austin, US	43	3380

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METHOD FOR COATING OR FILLING A POROUS MATERIAL

Number of patents in Portfolio can not be more than 2000

United States of America Patent

15208441

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15208441

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