Active-light-sensitive or radiation-sensitive resin composition, active-light-sensitive or radiation-sensitive film and pattern forming method, each using composition, and method for manufacturing electronic device

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United States of America Patent

PATENT NO 10261417
APP PUB NO 20170038685A1
SERIAL NO

15291538

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Abstract

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An active-light-sensitive or radiation-sensitive resin composition includes a resin (A) and a photoacid generator (B) capable of generating an acid upon irradiation with active light or radiation, in which the active-light-sensitive or radiation-sensitive resin composition contains at least a photoacid generator (B1) represented by the following General Formula (1) and a photoacid generator (B2) other than the photoacid generator (B1) as the photoacid generator (B).

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Patent Owner(s)

  • FUJIFILM CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Goto, Akiyoshi Shizuoka, JP 90 201
Kato, Keita Haibara-gun, JP 72 253
Shirakawa, Michihiro Shizuoka, JP 85 217
Yamamoto, Kei Shizuoka, JP 117 602
Yoshino, Fumihiro Shizuoka, JP 31 54

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