Pattern outline extraction device, pattern outline extraction method, and computer program product
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United States of America Patent
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Apr 25, 2017
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N/A
app pub date -
Dec 1, 2015
filing date -
Aug 7, 2015
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Abstract
According to one embodiment, a pattern outline extraction device includes a control unit, a secondary storage unit and a memory. The control unit reads the image data of the patterns formed by changing the process condition, and extracts outlines of the patterns from the image data. The control unit superposes the outlines, and sets straight measurement lines. The control unit calculates variations on the measurement lines relative to measurement points on the measurement lines at points of intersection of the measurement lines and the outlines, and calculates variation-process condition correspondence information. The control unit calculates predicted variations on the measurement lines relative to the measurement points corresponding to a desired process condition based on the variation-process condition correspondence information, calculates calculated points that are obtained by adding the predicted variations to the measurement points on the measurement lines, and calculates a predicted outline by connecting the calculated points.
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