CRYOPUMP
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United States of America Patent
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Issued Date -
Feb 16, 2017
app pub date -
Aug 9, 2016
filing date -
Aug 10, 2015
priority date (Note) -
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status (Latency Note)
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Abstract
A cryopump includes a gas flow regulation member which deflects a flow of gas, which flows in from a shield main opening, from a cryocooler structural portion. The gas flow regulation member is disposed to be adjacent to the cryocooler structural portion such that the gas flow regulation member is in contact with neither a second cooling stage nor a second cryopanel unit of a cryocooler. The gas flow regulation member may be thermally connected to a first cooling stage of the cryocooler.
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