Acoustic resonator device with an electrically-isolated layer of high-acoustic-impedance material interposed therein
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United States of America Patent
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Sep 3, 2019
Grant Date -
Feb 16, 2017
app pub date -
Oct 26, 2016
filing date -
Feb 27, 2014
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Abstract
An acoustic resonator device includes a bottom electrode disposed on a substrate over an air cavity, a first piezoelectric material layer disposed on the bottom electrode, an electrically-isolated layer of high-acoustic-impedance material disposed on the first piezoelectric material layer, a second piezoelectric material layer disposed on the electrically-isolated layer of high-acoustic impedance material, and a top electrode disposed on the second piezoelectric material layer, where an overlap among the top electrode, the first piezoelectric material layer, the electrically-isolated layer of high-acoustic-impedance material, the second piezoelectric material layer, and the bottom electrode over the air cavity defines a main membrane region.
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