Apparatus and method for generating high current negative hydrogen ion beam

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United States of America Patent

PATENT NO 9773636
SERIAL NO

14831468

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Abstract

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An apparatus to generate negative hydrogen ions. The apparatus may include an ion source chamber having a gas inlet to receive H2 gas; a light source directing radiation into the ion source chamber to generate excited H2 molecules having an excited vibrational state from at least some of the H2 gas; a low energy electron source directing low energy electrons into the ion source chamber, wherein H− ions are generated from at least some of the excited H2 molecules; and an extraction assembly arranged to extract the H− ions from the ion source chamber.

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Patent Owner(s)

  • VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bassom, Neil Hamilton, US 18 20
Lee, W Davis Newburyport, US 95 319
Renau, Anthony West Newbury, US 89 1752

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