Semiconductor apparatus, method for manufacturing the same, electronic device, and moving body
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United States of America Patent
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Oct 10, 2017
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N/A
app pub date -
Aug 8, 2016
filing date -
Aug 20, 2015
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Abstract
A semiconductor apparatus includes elements formed on a substrate, a first insulation layer, a first pad and a second pad arranged on the first insulation layer and located above the elements, and a second insulation layer that is arranged on the side surfaces and upper surfaces of the first pad and the second pad. The second insulation layer includes openings at upper surfaces of the first pad and the second pad. The thickness of the first pad and the second pad is 2 μm or more, the thickness of the second insulation layer is less than or equal to ⅖ of the thickness of the first pad and the second pad, and the distance between the first pad and the second pad is greater than or equal to four times the thickness of the first pad and the second pad.
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