Laser scan sequencing and direction with respect to gas flow

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United States of America Patent

PATENT NO 10328529
APP PUB NO 20170057016A1
SERIAL NO

15233364

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Employing laser scanning directions (20) that are oblique to and against a predominant gas flow direction (25) equalize the quality and waviness characteristics of orthogonal scribe lines (26) made by the laser scans. Positioning and sequence of multiple scan passes to form a feature wider than the width of a scribe line (26) can be controlled to enhance quality and waviness characteristics of the edges of the feature.

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Patent Owner(s)

  • ELECTRO SCIENTIFIC INDUSTRIES INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ferguson, Robert A Aloha, US 2 5
Finn, Daragh Beaverton, US 7 84

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