POLYMER COMPOUND, RADIATION SENSITIVE COMPOSITION AND PATTERN FORMING METHOD

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United States of America Patent

SERIAL NO

15151087

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Abstract

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A polymer compound including a unit structure represented by the following general formula (1):

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Patent Owner(s)

Patent OwnerAddress
MITSUBISHI GAS CHEMICAL COMPANY INC5-2 MARUNOUCHI 2-CHOME CHIYODA-KU TOKYO 100-8324
A SCHOOL CORPORATION KANSAI UNIVERSITY3-35 YAMATE-CHO 3-CHOME SUITA-SHI OSAKA 564-8680

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
ECHIGO, Masatoshi Tokyo, JP 132 598
KUDO, Hiroto Osaka, JP 8 3
SATO, Takashi Hiratsuka-shi, JP 951 9277
TOIDA, Takumi Hiratsuka-shi, JP 21 58

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