Piezoelectric element and piezoelectric element applied device

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United States of America Patent

PATENT NO 10186652
APP PUB NO 20170062693A1
SERIAL NO

15139884

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Abstract

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There is provided a piezoelectric element which includes a first electrode, a piezoelectric layer which is formed on the first electrode by using a solution method, and is formed from a compound oxide having a perovskite structure in which potassium, sodium, and niobium are provided, and a second electrode which is provided on the piezoelectric layer. A cross-sectional SEM image of the piezoelectric layer is captured at a magnification of 100,000. When evaluation is performed under a condition in which a measured value in a transverse direction is set to 1,273 nm, two or more voids are included in the piezoelectric layer, a difference between the maximum value and the minimum value among diameters of the voids to be largest in a film thickness direction is equal to or smaller than 14 nm, and the maximum value is equal to or smaller than 24 nm.

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Patent Owner(s)

  • SEIKO EPSON CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Isshiki, Tetsuya Shiojiri, JP 25 65
Kitada, Kazuya Suwa, JP 61 111
Kobayashi, Tomokazu Shiojiri, JP 35 201
Sakai, Tomohiro Matsumoto, JP 87 356
Sumi, Koji Shiojiri, JP 90 795
Takahashi, Toshiaki Chino, JP 141 1621

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