METHOD AND APPARATUS FOR CHARACERISING INSTRUMENT ERROR
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United States of America Patent
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Issued Date -
Mar 9, 2017
app pub date -
Apr 27, 2015
filing date -
May 6, 2014
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Abstract
A method for characterising instrument error in a surface measurement instrument, comprising obtaining first calibration measurement data representing a known surface form of a first reference object and obtaining second calibration measurement data representing a known surface form of a second reference object. At least a portion of the second calibration measurement data represents a measurement range that overlaps with at least a portion of a measurement range of the first calibration measurement data. A common error function is obtained that characterises the instrument error.
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