Pressure sensor, microphone, ultrasonic sensor, blood pressure sensor, and touch panel
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United States of America Patent
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Feb 19, 2019
Grant Date -
Mar 9, 2017
app pub date -
Sep 1, 2016
filing date -
Sep 9, 2015
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A pressure sensor of an embodiment includes a support portion, a transformable membrane part and a sensor portion. The membrane part includes an end portion supported by the support portion, and a first area and a second area. The first area is positioned between a center of the membrane part and the end portion and has a first rigidity. The second area is positioned between the first area and the end portion, and has a second rigidity lower than the first rigidity. The sensor portion is provided at the first area and includes a first magnetic layer, a second magnetic layer and a first intermediate layer provided between the first magnetic layer and the second magnetic layer. An end-side distance between the first area and the end portion is shorter than a center-side distance between the second area and the center of the membrane part.
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