SNOM SYSTEM WITH LASER-DRIVEN PLASMA SOURCE

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United States of America Patent

APP PUB NO 20170067934A1
SERIAL NO

15256294

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Abstract

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An s-SNOM near-field system containing an interferometer and configured to utilize IR-light output from a laser-driven plasma source of light. The system is equipped with (i) spectral and/or spatial filter(s) chosen to dimension the image of the plasma source formed at the tip of the system be substantially co-extensive with the tip, and/or (ii) an optical-inspection unit, located outside and not being part of the interferometer, that is structured to ensure that plasma source is imaged onto the tip of the system without astigmatism. The plasma-containing component(s) of the plasma source is/are engineered to have IR-light-output maximized in mid-IR range.

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Patent Owner(s)

Patent OwnerAddress
BRUKER NANO INC430 S CONGRESS AVENUE SUITE 7 RAVE MASK REPAIR BUSINESS UNIT DELRAY BEACH FL 33445

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Wagner, Martin Santa Barbara, US 74 507
Xu, Xiaoji Bethlehem, US 6 48

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