ALE smoothness: in and outside semiconductor industry

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9984858
SERIAL NO

15253481

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

Methods of etching and smoothening films by exposing to a halogen-containing plasma and an inert plasma within a bias window in cycles are provided. Methods are suitable for etching and smoothening films of various materials in the semiconductor industry and are also applicable to applications in optics and other industries.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

  • LAM RESEARCH CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kanarik, Keren Jacobs Los Altos, US 35 2076
Lill, Thorsten Santa Clara, US 99 3366
Marks, Jeffrey Saratoga, US 98 4597
Pan, Yang Los Altos, US 290 4414
Shen, Meihua Fremont, US 69 2336
Tan, Samantha Fremont, US 48 3102
Wise, Richard Los Gatos, US 71 1529

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
7.5 Year Payment $3600.00 $1800.00 $900.00 Nov 29, 2025
11.5 Year Payment $7400.00 $3700.00 $1850.00 Nov 29, 2029
Fee Large entity fee small entity fee micro entity fee
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00