TEMPLATE PRODUCING METHOD, TEMPLATE PRODUCING APPARATUS AND TEMPLATE INSPECTING APPARATUS
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United States of America Patent
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Mar 10, 2016
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Sep 11, 2015
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Abstract
In one embodiment, a template producing method includes coating a first template having a first pattern with a curable material, and curing the material. The method further includes producing a second template having a second pattern corresponding to the first pattern by peeling the cured material from the first template. The method further includes enlarging the second template, and pasting, on the enlarged second template, a substrate that holds a shape of the second template.
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