Chemical liquid tank

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10478752
APP PUB NO 20170074712A1
SERIAL NO

15065189

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Abstract

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A chemical liquid tank has a container to store chemical liquid, a sensor to measure a height of a liquid surface by irradiating the chemical liquid stored in the container with an ultrasonic wave and measuring time until a reflected wave reflected from the liquid surface of the chemical liquid is received, and a gas jetting port to spray a gas toward a part of the liquid surface comprising an irradiation position of the ultrasonic wave in the container.

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Patent Owner(s)

  • TOSHIBA MEMORY CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kurita, Masato Mie, JP 14 61

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