PHYSICAL QUANTITY SENSOR, ELECTRONIC APPARATUS, AND MOVING OBJECT
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United States of America Patent
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Issued Date -
Mar 16, 2017
app pub date -
Jun 21, 2016
filing date -
Jul 10, 2015
priority date (Note) -
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Abstract
A physical quantity sensor according to the invention includes a first movable electrode portion having a portion that is opposed to a first fixed electrode portion, and a second movable electrode portion having a portion that is opposed to a second fixed electrode portion. The physical quantity sensor further includes a movable mass portion that has a shape surrounding a first fixed electrode side fixing portion and a second fixed electrode side fixing portion in a plan view, and a first movable electrode side fixing portion and a second movable electrode side fixing portion that support the movable mass portion via a first elastic portion and a second elastic portion and are disposed at the outside of the movable mass portion in a plan view.
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