PHYSICAL QUANTITY SENSOR, ELECTRONIC APPARATUS, AND MOVING OBJECT

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20170074896A1
SERIAL NO

15188230

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A physical quantity sensor according to the invention includes a first movable electrode portion having a portion that is opposed to a first fixed electrode portion, and a second movable electrode portion having a portion that is opposed to a second fixed electrode portion. The physical quantity sensor further includes a movable mass portion that has a shape surrounding a first fixed electrode side fixing portion and a second fixed electrode side fixing portion in a plan view, and a first movable electrode side fixing portion and a second movable electrode side fixing portion that support the movable mass portion via a first elastic portion and a second elastic portion and are disposed at the outside of the movable mass portion in a plan view.

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First Claim

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Patent Owner(s)

Patent OwnerAddress
SEIKO EPSON CORPORATIONTOKYO

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
KIGURE, Shota Takasaki, JP 10 9
TANAKA, Satoru Chino, JP 287 2305

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