Three-dimensional semiconductor memory device including slit with lateral surfaces having periodicity

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10074665
APP PUB NO 20170077108A1
SERIAL NO

15257613

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Abstract

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According to one embodiment, it includes a stacked body including N-number of layers (N is an integer of 2 or more) stacked on a semiconductor substrate, opening portions penetrating the stacked body in a stacking direction, columnar bodies respectively disposed in the opening portions, and a slit dividing M-number of layers (M is an integer of 1 or more and (N−2) or less) of the stacked body in a horizontal direction from above, wherein the slit is formed with lateral surfaces respectively having a spatial periodicity in a horizontal plane.

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Patent Owner(s)

  • TOSHIBA MEMORY CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fujii, Kenichi Yokkaichi, JP 185 2315
Fujita, Masanori Yokkaichi, JP 68 1167
Imamura, Takeshi Yokkaichi, JP 213 2034
Inokuma, Hideki Yokkaichi, JP 27 232
Itoh, Takanobu Yokkaichi, JP 9 56
Kaneko, Hajime Yokkaichi, JP 27 328
Kawaguchi, Genki Yokkaichi, JP 12 65
Matsuura, Osamu Kuwana, JP 44 345
Wada, Hideo Yokkaichi, JP 51 528
Watanabe, Makoto Oita, JP 376 3283

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