Semiconductor device

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United States of America Patent

PATENT NO 9818855
SERIAL NO

15235391

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Abstract

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A semiconductor device according to an embodiment includes a first nitride semiconductor layer; a source electrode provided on the first nitride semiconductor layer; a drain electrode provided on the first nitride semiconductor layer; a gate electrode provided between the source electrode and the drain electrode; a first film provided between the source electrode and the gate electrode and between the gate electrode and the drain electrode; and a second film provided on the first film. The first film is provided on the first nitride semiconductor layer. The first film has a lower hydrogen diffusion coefficient than a hydrogen diffusion coefficient of a silicon oxide film.

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Patent Owner(s)

  • KABUSHIKI KAISHA TOSHIBA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kuraguchi, Masahiko Yokohama, JP 94 727
Nakano, Shintaro Kawasaki, JP 87 506
Saito, Hisashi Yokohama, JP 66 529
Shimizu, Tatsuo Shinagawa, JP 285 2225

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