MICROMECHANICAL LAYER SYSTEM

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United States of America Patent

APP PUB NO 20170081183A1
SERIAL NO

15311354

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A micromechanical layer system, having at least two mechanically active functional layers patterned independently of each other, which are arranged vertically one on top of the other and are functionally coupled to each other.

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Patent Owner(s)

Patent OwnerAddress
ROBERT BOSCH GMBHSTUTTGART

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Armbruster, Simon Wannweil, DE 40 172
Baader, Johannes Freiburg, DE 21 20
Haberer, Dietmar Reutlingen, DE 6 8
Hausner, Ralf Reutlingen, DE 8 108
Pinter, Stefan Reutlingen, DE 86 717
Straub, Rainer Ammerbuch, DE 30 84

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