Scanning an object using multiple mechanical stages

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United States of America Patent

PATENT NO 10068748
APP PUB NO 20170084425A1
SERIAL NO

15371332

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Abstract

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A method for scanning an object, the method may include moving an object by a first mechanical stage that follows a first scan pattern; introducing multiple movements, by a second mechanical stage, between the object and the first mechanical stage while the first mechanical stage follows the first scan pattern; and obtaining, by optics, images of multiple suspected defects while the first mechanical stage follows the first scan pattern; wherein a weight of the first mechanical stage exceeds a weight of the second mechanical stage.

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Patent Owner(s)

  • APPLIED MATERIALS ISRAEL LTD

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aspir, Doron Modiin-Macabim-Reut, IL 4 54
Belenky, Yuri Rishon Lezion, IL 7 53
Madmon, Yohanan Kiryat Eqron, IL 3 20
Naftali, Ron Shoham, IL 46 470
Sender, Benzion Modiin-Macabim-Reut, IL 13 226
Uziel, Yoram Misgav, IL 49 570

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