Process apparatus with on-the-fly substrate centering

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United States of America Patent

PATENT NO 10879101
APP PUB NO 20170084476A1
SERIAL NO

15369573

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A substrate processing apparatus including a frame defining a chamber with a substrate transport opening and a substrate transfer plane defined therein, a valve mounted to the frame and being configured to seal an atmosphere of the chamber when closed, the valve having a door movably disposed to open and close the substrate transport opening, and at least one substrate sensor element disposed on a side of the door and oriented to sense substrates located on the substrate transfer plane.

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Patent Owner(s)

  • BROOKS AUTOMATION, INC.

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Sharrock, Leigh F Londonderry, US 11 23

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