INSPECTION APPARATUS, AND ARTICLE MANUFACTURING METHOD
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United States of America Patent
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Mar 30, 2017
app pub date -
Sep 27, 2016
filing date -
Sep 30, 2015
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Abstract
An inspection apparatus for performing inspection of an object includes an illumination device that illuminates an object, an imaging device that images the illuminated object, and a processor configured to perform inspection processing based on plural images obtained by the imaging device respectively corresponding to plural light emitting regions of the illumination device. Two light emitting regions of the plural light emitting regions corresponding to mutually adjoining two azimuths of plural azimuths that illuminate the object have a mutually overlapping region.
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