Semiconductor Device and Method

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United States of America Patent

SERIAL NO

15279140

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Abstract

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In an embodiment, a semiconductor device includes a substrate, a plurality of columnar drift zones including a group III-nitride having a first conductivity type and a plurality of charge compensation structures. The columnar drift zones and the compensation structures are positioned alternately on a surface of the substrate.

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Patent Owner(s)

Patent OwnerAddress
INFINEON TECHNOLOGIES AUSTRIA AGSIEMENSSTRASSE 2 VILLACH 9500

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Vielemeyer, Martin Henning Villach, AT 7 12

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