METHOD FOR FORMING LaNiO3 THIN FILM
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United States of America Patent
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Mar 18, 2015
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Mar 25, 2014
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Abstract
A method for forming a LaNiO3 thin film is provided, the method including: a step of forming a coating film by coating a substrate surface which is coated with a Pt electrode with a LaNiO3 thin film-forming liquid composition and drying the LaNiO3 thin film-forming liquid composition in a state where amounts of H2, H2O, and CO adsorbed on the substrate surface per 1 cm2 are 1.0×10−10 g or less, 2.7×10−10 g or less, and 4.2×10−10 g or less, respectively; a step of pre-baking the coating film; and a step of forming a LaNiO3 thin film by baking the pre-baked coating film.
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