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Abstract

A method of examining a specimen in a Charged Particle Microscope, comprising the following steps:

Providing a specimen on a specimen holder;Heating the specimen to a temperature of at least 250° C.;Directing a beam of charged particles from a source through an illuminator so as to irradiate the specimen;Using a detector to detect a flux of electrons emanating from the specimen in response to said irradiation,wherein said detector comprises:A scintillator module, which produces photons in response to impingement by electrons in said flux;A photon sensor, for sensing said photons,and is configured to:Preferentially register a first category of photons, associated with impingement of electrons on said scintillator module;Selectively suppress a second category of photons, comprising thermal radiation from the heated specimen.

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First Claim