SOLAR CELL STRUCTURE AND METHOD FOR MANUFACTURING THE SAME
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United States of America Patent
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Sep 30, 2016
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Oct 7, 2015
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Abstract
A method of forming a solar cell structure is provided, which includes forming a metal electrode on a substrate, forming an absorber layer on the metal electrode, and forming a buffer layer on the absorber layer. The method also forms a titanium oxide layer on the buffer layer, wherein a thickness of the titanium oxide layer is greater than 0 and less than 10 nm. The method further forms a transparent conductive oxide layer on the titanium oxide layer. The step of forming the titanium oxide layer is atomic layer deposition (ALD) performed at a temperature of 100° C. to 180° C. with a precursor of titanium tetraisopropoxide.
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