Substrate supporting unit, substrate processing apparatus, and method of manufacturing substrate supporting unit
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United States of America Patent
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Apr 14, 2020
Grant Date -
Apr 20, 2017
app pub date -
Dec 29, 2016
filing date -
Feb 4, 2008
priority date (Note) -
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Abstract
Disclosed are a substrate supporting unit, a substrate processing apparatus, and a method of manufacturing the substrate supporting unit. The substrate supporting unit includes a susceptor provided with heaters to heat a substrate placed on the susceptor, and including a first temperature region and a second temperature region having a higher temperature than that of the first temperature region; and a heat dissipating member including a contact surface being in thermal contact with the second temperature region. The heat dissipating member further includes an opening corresponding to the first temperature region. The heat dissipating member formed in a ring shape, in which the opening is surrounded with the contact surface, and the contact surface of the heat dissipating member makes thermal contact with the lower surface of the susceptor.
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