ELECTRO-STATIC CHUCK WITH RADIOFREQUENCY SHUNT
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
N/A
app pub date -
Jun 15, 2015
filing date -
Jun 17, 2014
priority date (Note) -
Published
status (Latency Note)
Importance
Abstract
An electrostatic chuck (ESC) exhibits a ceramic body with planar electrodes applied as bottom and top electrodes connected by vias through the ceramic body and a conducting layer on top of said ceramic body. A conducting current path is being arranged around the edge of the ESC acting as an RF shunt connecting the RF chuck body with the back side of a substrate when arranged on said conducting top layer. Preferably, this RF shunt is construed as a conductive ring around the edges of the ESC, the preferred material being metal, noble metal or a carbon based conductive film
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully