Microelectromechanical and/or nanoelectromechanical structure with electrothermal actuation comprising at least two differently polarisable actuating beams

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United States of America Patent

PATENT NO 10917026
APP PUB NO 20170117825A1
SERIAL NO

15297243

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Abstract

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A microelectromechanical structure with electrothermal actuation including a fixed part, a moveable part, a first electrothermal actuating beam enabling an electric current to flow from the fixed part to the moveable part and a second electrothermal actuating beam enabling an electric current to flow from the fixed part to the moveable part, the beams being mechanically connected to the moveable part enabling a displacement of the moveable part by electrothermal actuation, an electrically conductive connecting element connecting the moveable part to the fixed part, a first connector for connecting the first actuating beam to a first polarisation source and a second connector for connecting the second actuating beam to a second polarisation source, such that the first and the second can be polarised differently and separately.

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Patent Owner(s)

Patent OwnerAddress
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES75015 PARIS
SAFRAN ELECTRONICS & DEFENSE92100 BOULOGNE-BILLANCOURT

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jourdan, Guillaume Grenoble, FR 29 171
Lehee, Guillaume Boulogne Billancourt, FR 14 21

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