Planar cavity MEMS and related structures, methods of manufacture and design structures

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United States of America Patent

PATENT NO 10011480
SERIAL NO

15403424

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Abstract

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A method of forming a Micro-Electro-Mechanical System (MEMS) includes forming a lower electrode on a first insulator layer within a cavity of the MEMS. The method further includes forming an upper electrode over another insulator material on top of the lower electrode which is at least partially in contact with the lower electrode. The forming of the lower electrode and the upper electrode includes adjusting a metal volume of the lower electrode and the upper electrode to modify beam bending.

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Patent Owner(s)

  • IBM CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jahnes, Christopher V Upper Saddle River, US 87 1864
Stamper, Anthony K Burlington, US 613 6573

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