Systems and methods for filtering radio frequencies from a signal of a thermocouple and controlling a temperature of an electrode in a plasma chamber
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United States of America Patent
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Aug 6, 2019
Grant Date -
May 4, 2017
app pub date -
Dec 10, 2015
filing date -
Oct 29, 2015
priority date (Note) -
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status (Latency Note)
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Abstract
A circuit including a first filter assembly and a controller. The first filter assembly is implemented on a printed circuit board. The first filter assembly includes a first filter and a second filter. The first filter receives a first signal from a first sensor, prevents passage of a first portion of the first signal and outputs a second signal. The first portion of the first signal is at a first radio frequency. A second portion of the first signal is indicative of a first temperature of a first electrode in a plasma chamber. The second filter receives the second signal and prevents passage of a portion of the second signal. The portion of the second signal is at a second radio frequency. The second radio frequency is less than the first radio frequency. The controller adjusts a temperature of the first electrode based on an output of the second filter.
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