Liquid discharge apparatus, imprint apparatus, and method of manufacturing article

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10350631
APP PUB NO 20170129235A1
SERIAL NO

15343611

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A liquid supply apparatus which supplies a liquid to an object, includes a discharger configured to discharge a liquid; a driving mechanism configured to arrange the discharger at a plurality of positions including a first position and a second position; a first exhaust port arranged so as to face the discharger arranged at the first position and configured to exhaust heat generated by the discharger arranged at the first position; and a second exhaust port arranged so as to face the discharger arranged at the second position and configured to exhaust heat generated by the discharger arranged at the second position.

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First Claim

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Patent Owner(s)

  • CANON KABUSHIKI KAISHA

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Arai, Tsuyoshi Utsunomiya, JP 113 698
Tamura, Takefumi Tokyo, JP 8 54

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