TEMPLATE CLEANING METHOD, TEMPLATE CLEANING APPARATUS, AND IMPRINT METHOD
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United States of America Patent
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Issued Date -
May 18, 2017
app pub date -
Feb 3, 2016
filing date -
Nov 13, 2015
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Abstract
According to an embodiment, at first, a template is put into a cleaning bath containing a cleaning liquid inside a first process chamber. Then, an inactive gas is supplied into the first process chamber and the cleaning liquid is heated, so as to set temperature and pressure conditions that turn the cleaning liquid into a supercritical fluid state or subcritical fluid state. Then, the template is immersed in the cleaning liquid in the supercritical fluid state or subcritical fluid state for a predetermined time period.
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