Imprinting apparatus, recording medium, and imprinting method

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United States of America Patent

PATENT NO 10331028
APP PUB NO 20170136683A1
SERIAL NO

15011915

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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According to one embodiment, an imprinting apparatus is provided. The imprinting apparatus includes a controller that controls a resist drop position on a wafer to be imprinted with a pattern, using a first resist drop recipe corresponding to a first topography of the wafer.

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Patent Owner(s)

  • TOSHIBA MEMORY CORPORATION

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Iijima, Jun Yokkaichi, JP 43 418
Nishimura, Takahito Kuwana, JP 20 39

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