Apparatus for UV flowable dielectric

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United States of America Patent

PATENT NO 10388546
APP PUB NO 20170137943A1
SERIAL NO

14942703

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Abstract

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Provided are methods and apparatus for ultraviolet (UV) assisted capillary condensation to form dielectric materials. In some embodiments, a UV driven reaction facilitates photo-polymerization of a liquid phase flowable material. Applications include high quality gap fill in high aspect ratio structures and por sealing of a porous solid dielectric film. According to various embodiments, single station and multi-station chambers configured for capillary condensation and UV exposure are provided.

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Patent Owner(s)

  • LAM RESEARCH CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, David Fang Wei San Jose, US 4 16
Hamilton, Shawn M Boulder Creek, US 9 172
Liang, Wenbo Fremont, US 15 65
Mohn, Jonathan D Saratoga, US 14 965
Ndiege, Nicholas Muga Fremont, US 5 321
Van, Cleemput Patrick A San Jose, US 52 3483

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