NOVEL X-RAY IMAGING TECHNIQUE

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United States of America Patent

APP PUB NO 20170138870A1
SERIAL NO

15264132

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Abstract

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A method of imaging a specimen using an X-ray imaging apparatus, comprising the following steps:

    Providing the specimen on a specimen holder;Directing a flux of X-rays from a source through the specimen and onto an X-ray camera, which method additionally comprises the following steps:Embodying the source as a cluster of component sources, with a confined angular span relative to the specimen;Using said camera to record a cumulative, composite image from said component sources;Mathematically deconvolving said composite image.

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Patent Owner(s)

Patent OwnerAddress
FEI COMPANY5350 NE DAWSON CREEK DRIVE HILLSBORO OR 97124-5793

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Boughorbel, Faysal Eindhoven, NL 20 253
Buijsse, Bart Eindhoven, NL 38 330

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