Pneumatic exhaust system

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United States of America Patent

PATENT NO 10354842
APP PUB NO 20170140901A1
SERIAL NO

14940831

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Importance

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Abstract

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An apparatus, for use in a processing chamber is provided. A pneumatic cylinder is provided. A manifold with a supply and an exhaust is controllably connected to the pneumatic cylinder. A dry gas supply is in fluid connection with and provides positive pressure to the exhaust of the manifold.

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Patent Owner(s)

  • LAM RESEARCH CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Edem, Jacqulyn San Jose, US 1 0

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